GENEVA, May 17 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2024/081224) for "STORAGE SYSTEM FOR SEMICONDUCTOR PRODUCTION OBJECTS AND STORAGE MODULE" on Nov 05, 2024. With publication no. WO/2025/099011, the details related to the patent application was published on May 15, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWETZ, Michael (Haldenstrasse 818400 Winterthur), SCHMIDT, Alexander (Windeggstrasse 348203 Schaffhausen)
Abstract:
Provided is a storage system for semiconductor production objects, especially reticles, compr...