GENEVA, Sept. 1 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2025/051223) for "STOCKER SYSTEM FOR STORAGE OF RETICLES" on Jan 17, 2025. With publication no. WO/2025/176390, the details related to the patent application was published on Aug 28, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHWETZ, Michael (Haldenstrasse 818400 Winterthur), SCHMIDT, Alexander (Windeggstrasse 348203 Schaffhausen)
Abstract:
Stocker system for storage of a plurality of reticles, especially EUV reticles, comprising a plurality of storage pods (110)...