GENEVA, June 10 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2024/082256) for "STOCKER FOR STORING A SEMICONDUCTOR FABRICATION ARTICLE" on Nov 13, 2024. With publication no. WO/2025/114010, the details related to the patent application was published on Jun 05, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): MEIER, Karl (Barzingergasse 198240 Thayngen), HUG, Andreas (Kirchweg 78555 Mullheim)
Abstract:
The invention provides a stocker (100) for storing a semiconductor fabrication article, particularly a reticle, with a motorized s...