GENEVA, Nov. 10 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/IB2025/054452) for "METHODS FOR CLEANING A SEMICONDUCTOR CARRIER DEVICE" on Apr 29, 2025. With publication no. WO/2025/229527, the details related to the patent application was published on Nov 06, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): BAUMEISTER, Cornelia (LohrstraBe 1478647 Trossingen), GHASEMIANSAFAEI, Mandana (Worblinger StraBe 1878224 Singen)
Abstract: Disclosed are methods for cleaning a container configured and adapted to hold wafers or reticles during a w...