INTERNATIONAL PATENT: BROOKS AUTOMATION (GERMANY) GMBH FILES APPLICATION FOR "METHOD AND SYSTEM FOR CLEANING CONTAINERS CONFIGURED AND ADAPTED TO STORE WAFERS OR RETICLES"

GENEVA, Nov. 10 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/IB2025/054451) for "METHOD AND SYSTEM FOR CLEANING CONTAINERS CONFIGURED AND ADAPTED TO STORE WAFERS OR RETICLES" on Apr 29, 2025. With publication no. WO/2025/229526, the details related to the patent application was published on Nov 06, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SARASWATULA, Jagdish (HauptstraBe 1178224 Singen)

Abstract: Method and system for cleaning a container configured and adapted to hold wafers or reticles, comprising generating at least one d...