INTERNATIONAL PATENT: BROOKS AUTOMATION (GERMANY) GMBH FILES APPLICATION FOR "METHOD AND DEVICE FOR CLEANING A SEMICONDUCTOR CARRIER DEVICE AND USE OF A CLEANING FLUID"

GENEVA, Nov. 17 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2025/062769) for "METHOD AND DEVICE FOR CLEANING A SEMICONDUCTOR CARRIER DEVICE, AND USE OF A CLEANING FLUID" on May 09, 2025. With publication no. WO/2025/233521, the details related to the patent application was published on Nov 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GHASEMIANSAFAEI, Mandana (Worblinger StraBe 1878224 Singen), QUARTI, Ulrich (BucklestraBe 82a78467 Konstanz), BAUMEISTER, Cornelia (LohrstraBe 1478647 Trossingen), PFAU, Thorsten (Am Rathaus 57...