INTERNATIONAL PATENT: BROOKS AUTOMATION (GERMANY) GMBH FILES APPLICATION FOR "A CLEANING SYSTEM AND A METHOD FOR CLEANING A CARRIER FOR SEMICONDUCTOR SUBSTRATES OR AT LEAST A SURFACE OF THE CARRIER"

GENEVA, Feb. 16 -- BROOKS AUTOMATION (GERMANY) GMBH (Daimlerstrasse 778256 SteiBlingen) filed a patent application (PCT/EP2024/069694) for "A CLEANING SYSTEM AND A METHOD FOR CLEANING A CARRIER FOR SEMICONDUCTOR SUBSTRATES OR AT LEAST A SURFACE OF THE CARRIER" on Jul 11, 2024. With publication no. WO/2025/031722, the details related to the patent application was published on Feb 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YANG, Po-Yu (EkkehardstraBe 3978315 Radolfzell), GHASEMIANSAFAEI, Mandana (Worblinger StraBe 1878224 Singen), BAUMEISTER, Cornelia (LohrstraBe 1478647 Trossingen), ...