INTERNATIONAL PATENT: BREWER SCIENCE, INC. FILES APPLICATION FOR "ACIDIC SPIN-ON CARBON (SOC) LAYER FOR EUV LITHOGRAPHY"

GENEVA, July 3 -- BREWER SCIENCE, INC. (2401 Brewer DriveRolla, Missouri 65401) filed a patent application (PCT/US2024/061272) for "ACIDIC SPIN-ON CARBON (SOC) LAYER FOR EUV LITHOGRAPHY" on Dec 20, 2024. With publication no. WO/2025/137444, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LI, Si (1503 Huntleigh DrRolla, Missouri 65401), SWEAT, Daniel Patrick (903 Country LnRolla, Missouri 65401)

Abstract: Methods of using an acid-generating, spin-on carbon (SOC) layer for EUV lithography are disclosed. The methods can b...