INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "UPPER ELECTRODE ASSEMBLY, SEMICONDUCTOR PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING DEVICE"

Posted On: 2026-02-22

GENEVA, Feb. 22 -- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD. (NO.8 Wenchang Avenue, Beijing Economic-Technological Development Area,Daxing District, Beijing 100176), 北京北方华创微电子装备有限公司 (中国北京市大兴区北京经济技术开发区文昌大道8号) filed a patent application (PCT/CN2025/112391) for "UPPER ELECTRODE ASSEMBLY, SEMICONDUCTOR PROCESS CHAMBER, AND SEMICONDUCTOR PROCESSING DEVICE" on Aug 04, 2025. With publication no. WO/2026/037138, the details related to the patent application was published on Feb 19, 202...

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INTERNATIONAL PATENT: BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., 北京北方华创微电子装备有限公司 FILES APPLICATION FOR "UPPER ELECTRODE ASSEMBLY, SEMICONDUCTOR PROCESS CHAMBER AND SEMICONDUCTOR PROCESSING DEVICE"