INTERNATIONAL PATENT: BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD., MATTSON TECHNOLOGY, INC. FILES APPLICATION FOR "GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS"

GENEVA, June 4 -- BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY CO., LTD. (No. 8 Building, No. 28 Jinghai Er Rd.Economic and Technical Development ZoneBeijing 100176), MATTSON TECHNOLOGY, INC. (47131 Bayside ParkwayFremont, California 94538) filed a patent application (PCT/US2024/052709) for "GAS DELIVERY SYSTEM FOR A THERMAL PROCESSING APPARATUS" on Oct 24, 2024. With publication no. WO/2025/111099, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAUER, Matthias (c/o Mattson Technology, Inc.47131 Bayside ParkwayFremont, Califo...