INTERNATIONAL PATENT: BASF SE FILES APPLICATION FOR "COMPOSITIONS AND METHODS FOR REMOVAL OF TUNGSTEN AND DIELECTRIC LAYERS"

GENEVA, May 5 -- BASF SE (Carl-Bosch-StraBe 3867056 Ludwigshafen am Rhein) filed a patent application (PCT/EP2024/080015) for "COMPOSITIONS AND METHODS FOR REMOVAL OF TUNGSTEN AND DIELECTRIC LAYERS" on Oct 24, 2024. With publication no. WO/2025/088005, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WEI, Te Yu (No. 31, Jingjian 2nd RoadTAOYUAN CITY, 32853), YEH, Shih Chieh (No. 31, Jingjian 2nd RoadTAOYUAN CITY, 32853), TSAI, Tsung Yu (No. 31, Jingjian 2nd RoadTAOYUAN CITY, 32853), LAUTER, Michael (Carl-Bosch-StraBe 38670...