INTERNATIONAL PATENT: AXUS TECHNOLOGY, LLC FILES APPLICATION FOR "APPARATUS AND METHOD FOR CLOSED LOOP CONTROLLED COOLING IN A WAFER PROCESSING SYSTEM"

GENEVA, Jan. 28 -- AXUS TECHNOLOGY, LLC (7474 West Chandler BoulevardChandler, Arizona 85226) filed a patent application (PCT/US2024/038411) for "APPARATUS AND METHOD FOR CLOSED LOOP CONTROLLED COOLING IN A WAFER PROCESSING SYSTEM" on Jul 17, 2024. With publication no. WO/2025/019606, the details related to the patent application was published on Jan 23, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): TROJAN, Daniel Ray (c/o Axus Technology, LLC7474 West Chandler BoulevardChandler, Arizona 85226), SHUGRUE, John Kevin (c/o Axus Technology, LLC7474 West Chandler BoulevardChandler, Arizona 8522...