INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "TWIST AND TILT VERIFICATION USING DIFFRACTION PATTERNS"

GENEVA, April 8 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/048201) for "TWIST AND TILT VERIFICATION USING DIFFRACTION PATTERNS" on Sep 24, 2024. With publication no. WO/2025/072193, the details related to the patent application was published on Apr 03, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GEISSBUHLER, Phillip (118 Arlington StreetWinchester, Massachusetts 01890), RAHMAN, FHM Faridur (92 King George DriveBoxford, Massachusetts 01921), BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982)

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