INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "SYSTEM AND METHOD OF VERIFYING WORKPIECE ALIGNMENT"

GENEVA, June 19 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/059244) for "SYSTEM AND METHOD OF VERIFYING WORKPIECE ALIGNMENT" on Dec 09, 2024. With publication no. WO/2025/123052, the details related to the patent application was published on Jun 12, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): NOURI, Yusef (8 Amherst RoadBeverly, Massachusetts 01915)

Abstract: A workpiece processing system and method are disclosed for determining an alignment of a workpiece upon a workpiece support using a retractable sensor. ...