INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "SYSTEM AND METHOD FOR MANAGING SOLID PHASE PRECURSORS FOR AN ION IMPLANTATION SYSTEM"

GENEVA, Aug. 19 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/015147) for "SYSTEM AND METHOD FOR MANAGING SOLID PHASE PRECURSORS FOR AN ION IMPLANTATION SYSTEM" on Feb 07, 2025. With publication no. WO/2025/171361, the details related to the patent application was published on Aug 14, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), COLVIN, Neil (5 Dunbarton DriveMerrimack, New Hampshire 03054), ROMANOV, Vladimir (73 Ward WayDanville, New Hampshire 03819),...