INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "SYSTEM AND METHOD FOR DYNAMIC LOADLOCK PRESSURE CONTROL"

GENEVA, July 3 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/060472) for "SYSTEM AND METHOD FOR DYNAMIC LOADLOCK PRESSURE CONTROL" on Dec 17, 2024. With publication no. WO/2025/136919, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAGGETT, John (7 Lakeshore DriveAmesbury, Massachusetts 01913)

Abstract: A workpiece processing system has a process chamber for processing a workpiece within a process environment at vacuum pressure, defining a proc...