INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "METHOD AND APPARATUS FOR ION BEAM DIRECTIONAL DEPOSITION"

GENEVA, Oct. 1 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/021206) for "METHOD AND APPARATUS FOR ION BEAM DIRECTIONAL DEPOSITION" on Mar 24, 2025. With publication no. WO/2025/199544, the details related to the patent application was published on Sep 25, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GILCHRIST, Glen (111 Sheldon RoadWingdale, New York 12594)

Abstract: A deposition system has an ion deposition apparatus configured to direct a deposition species toward a workpiece along a path. The workpiece has one...