INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "IN-SITU, PRE-IMPLANT WAFER CHARACTERIZATION SYSTEM AND METHOD"

GENEVA, July 21 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/011270) for "IN-SITU, PRE-IMPLANT WAFER CHARACTERIZATION SYSTEM AND METHOD" on Jan 10, 2025. With publication no. WO/2025/151833, the details related to the patent application was published on Jul 17, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GALICA, Scott (28 Ansie RoadChelmsford, Massachusetts 01824)

Abstract: An ion implantation system includes a wafer inspection system for inspecting wafers prior to ion implantation. The inspection facilitates ...