INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "HIGH-EFFICIENCY TARGET FOR AN ION SOURCE"

GENEVA, June 25 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/059715) for "HIGH-EFFICIENCY TARGET FOR AN ION SOURCE" on Dec 12, 2024. With publication no. WO/2025/128787, the details related to the patent application was published on Jun 19, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ABESHAUS, Joshua (173 Orchard Hill RoadHaverhill, Massachusetts 01835), BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), COLVIN, Neil (5 Dunbarton DriveMerrimack, New Hampshire 03054), ZIMMERMAN, Camilla (105 Old Essex...