INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "GRANULAR SPUTTER SOURCE TARGET WITH REPELLER CUP AND METHOD FOR USE THEREOF"

GENEVA, Oct. 20 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/023977) for "GRANULAR SPUTTER SOURCE TARGET WITH REPELLER CUP AND METHOD FOR USE THEREOF" on Apr 09, 2025. With publication no. WO/2025/217342, the details related to the patent application was published on Oct 16, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): ABESHAUS, Joshua (173 Orchard Hill RoadHaverhill, Massachusetts 01835), BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), ERNI, Makita (115 Lowell Street, Apt #1Peabody, Massachusetts ...