INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "ELECTROSTATIC CHUCK WITH CONTROLLABLE TEMPERATURE, ION IMPLANTATION SYSTEM USING THE SAME AS WELL AS METHOD OF CONTROLLING THE TEMPERATURE IN SAID ELECTROSTATIC CHUCK"

GENEVA, June 12 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/057711) for "ELECTROSTATIC CHUCK WITH CONTROLLABLE TEMPERATURE, ION IMPLANTATION SYSTEM USING THE SAME AS WELL AS METHOD OF CONTROLLING THE TEMPERATURE IN SAID ELECTROSTATIC CHUCK" on Nov 27, 2024. With publication no. WO/2025/117715, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAGGETT, John (7 Lakeshore DriveAmesbury, Massachusetts 01913)

Abstract: A clamping system has a workpie...