INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "DUAL FORCE LIFT AND GROUND PINS FOR ELECTROSTATIC CHUCK AND METHOD FOR USE THEREOF"

GENEVA, Nov. 25 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/029224) for "DUAL FORCE LIFT AND GROUND PINS FOR ELECTROSTATIC CHUCK AND METHOD FOR USE THEREOF" on May 13, 2025. With publication no. WO/2025/240535, the details related to the patent application was published on Nov 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MENEGHINI, Paul (60 Prospect StreetIpswich, Massachusetts 01938), SZETO, Vincent (65 Cragmore RoadNewton, Massachusetts 02464)

Abstract: The disclosure is generally directed to an electrosta...