INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "DUAL CATHODE TEMPERATURE-CONTROLLED MULTI-CATHODE ION SOURCE"

GENEVA, March 19 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/046232) for "DUAL CATHODE TEMPERATURE-CONTROLLED MULTI-CATHODE ION SOURCE" on Sep 11, 2024. With publication no. WO/2025/054632, the details related to the patent application was published on Mar 13, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), ABESHAUS, Joshua (173 Orchard Hill RoadHaverhill, Massachusetts 01835), SPORLEDER, David (264 Davis RoadBedford, Massachusetts 01730)

Abstract: A...