INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "DIRECT VOLTAGE CONTROL OF A CLAMPING SURFACE OF AN ELECTROSTATIC CLAMP"

GENEVA, Jan. 7 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2025/035811) for "DIRECT VOLTAGE CONTROL OF A CLAMPING SURFACE OF AN ELECTROSTATIC CLAMP" on Jun 27, 2025. With publication no. WO/2026/006812, the details related to the patent application was published on Jan 02, 2026.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FRYER, Robert (112 Gile RoadNottingham, New Hampshire 03290), WENZEL, Kevin (11 Glenn RoadBelmont, Massachusetts 02478)

Abstract: A system and method for clamping a workpiece positions a workpiece on a c...