INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "DEPOSITION MONITOR FOR SEMICONDUCTOR MANUFACTURING SYSTEM"

GENEVA, May 28 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/054388) for "DEPOSITION MONITOR FOR SEMICONDUCTOR MANUFACTURING SYSTEM" on Nov 04, 2024. With publication no. WO/2025/106288, the details related to the patent application was published on May 22, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): GEISSBUHLER, Phillip (118 Arlington StreetWinchester, Massachusetts 01890), BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), HOGLUND, David (106 Grafton StreetArlington, Massachusetts 02474), ROMANOV, V...