INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING"

GENEVA, May 15 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/054188) for "APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING" on Nov 01, 2024. With publication no. WO/2025/096998, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CRISTOFORO, Michael (2 Norge RoadBeverly, Massachusetts 01915), VANDERBERG, Bo (36 Woodbury StreetGloucester, Massachusetts 01930)

Abstract: A profiling apparatus (200) has a hollow cylinder (206) having a circum...