INTERNATIONAL PATENT: AXCELIS TECHNOLOGIES, INC. FILES APPLICATION FOR "ACTIVELY HEATED TARGET TO GENERATE AN ION BEAM"

GENEVA, April 17 -- AXCELIS TECHNOLOGIES, INC. (108 Cherry Hill DriveBeverly, Massachusetts 01915) filed a patent application (PCT/US2024/049768) for "ACTIVELY HEATED TARGET TO GENERATE AN ION BEAM" on Oct 03, 2024. With publication no. WO/2025/076203, the details related to the patent application was published on Apr 10, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): COLVIN, Neil (5 Dunbarton DriveMerrimack, New Hampshire 03054), BASSOM, Neil (260 Echo Cove RoadHamilton, Massachusetts 01982), ABESHAUS, Joshua (173 Orchard Hill RoadHaverhill, Massachusetts 01835)

Abstract: An arc chamber...