INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "WAFER STAGE WITH THERMALLY-CONDITIONED Z-STAGE"

GENEVA, May 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079080) for "WAFER STAGE WITH THERMALLY-CONDITIONED Z-STAGE" on Oct 15, 2024. With publication no. WO/2025/087745, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YU, Dongchi (80 W Tasman DriveSan Jose, California 95134), LIU, Yu (80 W Tasman DriveSan Jose, California 95134), CHANG, Huan-Yu (80 W Tasman DriveSan Jose, California 95134), HUANG, Zhuangxiong (P.O. Box 3245500 AH Veldhoven)

Abstract: A system for c...