GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/083625) for "VACUUM EXPOSURE APPARATUS AND ASSESSMENT SYSTEM" on Nov 26, 2024. With publication no. WO/2025/131589, the details related to the patent application was published on Jun 26, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VAN DER TOORN, Jan-Gerard, Cornelis (P.O. Box 3245500 AH Veldhoven), CAO, Mingwei (80 W Tasman DriveSan Jose, California 95134), SLOT, Erwin (P.O. Box 3245500 AH Veldhoven)
Abstract:
The present invention provides a vacuum exposure apparatus. The v...