INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "TIME-DIVISION MULTIPLEXING WAFER Z TILT-HEIGHT SENSOR FOR CHARGED PARTICLE BEAM FOCUSING"

GENEVA, Aug. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/050187) for "TIME-DIVISION MULTIPLEXING WAFER Z TILT-HEIGHT SENSOR FOR CHARGED PARTICLE BEAM FOCUSING" on Jan 06, 2025. With publication no. WO/2025/157580, the details related to the patent application was published on Jul 31, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): LU, Yiming (80 W Tasman DriveSan Jose, California 95134), YE, Ning (80 W Tasman DriveSan Jose, California 95134), FEI, Xuan (80 W Tasman DriveSan Jose, California 95134), KANG, Zhiwen (80 W Tasman DriveSan Jose,...