INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "THERMAL DEFORMATION COMPENSATION IN CHARGED-PARTICLE BEAM APPARATUS"

GENEVA, July 1 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/086977) for "THERMAL DEFORMATION COMPENSATION IN CHARGED-PARTICLE BEAM APPARATUS" on Dec 17, 2024. With publication no. WO/2025/132492, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): CASUCCI, Paul (80 W Tasman DriveSan Jose, California 95134), CAO, Qian (80 W Tasman DriveSan Jose, California 95134), YU, Le (80 W Tasman DriveSan Jose, California 95134), XI, Qingpo (80 W Tasman DriveSan Jose, California 95134)

Ab...