INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "THERMAL CONDITIONING SYSTEM FOR USE IN AN EUV LITHOGRAPHIC APPARATUS AND METHOD OF THERMALLY CONDITIONING A PATTERNING DEVICE IN AN EUV LITHOGRAPHIC APPARATUS"

GENEVA, April 28 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/076950) for "THERMAL CONDITIONING SYSTEM FOR USE IN AN EUV LITHOGRAPHIC APPARATUS AND METHOD OF THERMALLY CONDITIONING A PATTERNING DEVICE IN AN EUV LITHOGRAPHIC APPARATUS" on Sep 25, 2024. With publication no. WO/2025/082713, the details related to the patent application was published on Apr 24, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BAJONERO CANONICO, Emilio (P.O. Box 3245500 AH Veldhoven), JANSEN, Rick (P.O. Box 3245500 AH Veldhoven), JANSSEN, Franciscus, Johannes, Jos...