INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR MOTION CONTROL OF A PATTERNING DEVICE IN A LITHOGRAPHY APPARATUS"

GENEVA, April 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/075784) for "SYSTEMS AND METHODS FOR MOTION CONTROL OF A PATTERNING DEVICE IN A LITHOGRAPHY APPARATUS" on Sep 16, 2024. With publication no. WO/2025/061615, the details related to the patent application was published on Mar 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): KIMMAN, Maarten, Hartger (P.O. Box 3245500 AH Veldhoven), VERMEULEN, Marcus, Martinus, Petrus, Adrianus (P.O. Box 3245500 AH Veldhoven), VAN GILS, Petrus, Franciscus (P.O. Box 3245500 AH Veldhoven), KAMMINGA, J...