INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR MOTION CONTROL IN A SEMICONDUCTOR MANUFACTURING APPARATUS"

GENEVA, May 11 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077398) for "SYSTEMS AND METHODS FOR MOTION CONTROL IN A SEMICONDUCTOR MANUFACTURING APPARATUS" on Sep 30, 2024. With publication no. WO/2025/093202, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BUSTRAAN, Krijn, Frederik (P.O. Box 3245500 AH Veldhoven), FINNEY, Nathan, Robert (77 Danbury RoadWilton, Connecticut 06897), DELPUERTO, Santiago E. (77 Danbury RoadWilton, Connecticut 06897), HUANG, Yang-Shan (P.O. Bo...