INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR COOLING IN INSPECTION SYSTEMS"

GENEVA, May 5 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079261) for "SYSTEMS AND METHODS FOR COOLING IN INSPECTION SYSTEMS" on Oct 16, 2024. With publication no. WO/2025/087776, the details related to the patent application was published on May 01, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): YU, Dongchi (80 W Tasman DriveSan Jose, California 95134), LIN, Yi-Chen (80 W Tasman DriveSan Jose, California 95134), FU, Shao-Wei (80 W Tasman DriveSan Jose, California 95134), CHANG, Huan-Yu (80 W Tasman DriveSan Jose, California 95134), LIU, Y...