INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS AND METHODS FOR BEAM ALIGNMENT IN MULTI CHARGED-PARTICLE BEAM SYSTEMS"

GENEVA, March 24 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/073853) for "SYSTEMS AND METHODS FOR BEAM ALIGNMENT IN MULTI CHARGED-PARTICLE BEAM SYSTEMS" on Aug 26, 2024. With publication no. WO/2025/056308, the details related to the patent application was published on Mar 20, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): XI, Qingpo (80 W Tasman DriveSan Jose, California 95134), REN, Weiming (80 W Tasman DriveSan Jose, California 95134)

Abstract: Systems and methods of aligning beams with an aperture array for multi-beam inspection of ...