INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS, METHODS AND SOFTWARE FOR PHASE-BASED ALIGNMENT SENSORS"

GENEVA, Dec. 1 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/061996) for "SYSTEMS, METHODS, AND SOFTWARE FOR PHASE-BASED ALIGNMENT SENSORS" on Apr 30, 2025. With publication no. WO/2025/242413, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): MEHTA, Nikhil (77 Danbury RoadWilton, Connecticut 06897), ERALP, Muhsin (77 Danbury RoadWilton, Connecticut 06897), LIN, Yuxiang (77 Danbury RoadWilton, Connecticut 06897)

Abstract: Disclosed is a metrology system having an optical mo...