INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEMS, METHODS AND SOFTWARE FOR MODEL-BASED COMBINED ALIGNMENT AND OVERLAY METROLOGY"

GENEVA, Dec. 1 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/061998) for "SYSTEMS, METHODS, AND SOFTWARE FOR MODEL-BASED COMBINED ALIGNMENT AND OVERLAY METROLOGY" on May 01, 2025. With publication no. WO/2025/242415, the details related to the patent application was published on Nov 27, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): FU, Jiyou (80 W Tasman DriveSan Jose, California 95134), MENCHTCHIKOV, Boris (80 W Tasman DriveSan Jose, California 95134), REHMAN, Samee, Ur (80 W Tasman DriveSan Jose, California 95134), ZHANG, Chenyu (80 W Tas...