INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SYSTEM AND METHODS FOR OFFLINE CALIBRATION OF RETICLE, OPTICAL ELEMENT AND SUBSTRATE THERMAL HEATING MODELS"

GENEVA, June 30 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/082881) for "SYSTEM AND METHODS FOR OFFLINE CALIBRATION OF RETICLE, OPTICAL ELEMENT AND SUBSTRATE THERMAL HEATING MODELS" on Nov 19, 2024. With publication no. WO/2025/131506, the details related to the patent application was published on Jun 26, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): SUBRAMANIAN, Raaja Ganapathy (P.O. Box 3245500 AH Veldhoven), MOEST, Bearrach (P.O. Box 3245500 AH Veldhoven), PAARHUIS, Bart, Dinand (P.O. Box 3245500 AH Veldhoven)

Abstract: A lithograph...