GENEVA, Dec. 15 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/062216) for "SUPPORT SYSTEM" on May 05, 2025. With publication no. WO/2025/252370, the details related to the patent application was published on Dec 11, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): DEENEN, Daniel, Andreas (P.O. Box 3245500 AH Veldhoven), VAN DER SANDEN, Jacobus, Cornelis, Gerardus (P.O. Box 3245500 AH Veldhoven), VAN DE KERKHOF, Marcus, Adrianus (P.O. Box 3245500 AH Veldhoven)
Abstract: Disclosed herein is a support system for an EUV lithography apparatus (LA)...