GENEVA, Jan. 12 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/064599) for "SUBSTRATE SUPPORT ASSEMBLY" on May 27, 2025. With publication no. WO/2026/008215, the details related to the patent application was published on Jan 08, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): AGAR, Anil, Can (P.O. Box 3245500 AH Veldhoven), DEBOUGNOUX, Frank (P.O. Box 3245500 AH Veldhoven), HUANG, Zhuangxiong (P.O. Box 3245500 AH Veldhoven), VAN GILS, Petrus, Franciscus (P.O. Box 3245500 AH Veldhoven), KIMMAN, Maarten, Hartger (P.O. Box 3245500 AH Veldhoven), ...