GENEVA, Jan. 26 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/066683) for "SUBSTRATE SUPPORT" on Jun 16, 2025. With publication no. WO/2026/017338, the details related to the patent application was published on Jan 22, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): VOSS, Sven (P.O. Box 3245500 AH Veldhoven)
Abstract: A substrate support configured to support a substrate. The substrate support comprising a plurality of concentrically arranged clamping regions, wherein at least one extraction orifice is defined in each of the plurality of con...