INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SUBSTRATE SUPPORT, SUBSTRATE SUPPORT SYSTEM AND METHOD TO CLAMP A SUBSTRATE ON A SUBSTRATE SUPPORT"

GENEVA, May 17 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/077551) for "SUBSTRATE SUPPORT, SUBSTRATE SUPPORT SYSTEM AND METHOD TO CLAMP A SUBSTRATE ON A SUBSTRATE SUPPORT" on Oct 01, 2024. With publication no. WO/2025/098681, the details related to the patent application was published on May 15, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): BOSHOUWERS, Augustinus, Hubert, Maria (P.O. Box 3245500 AH Veldhoven), GIJSBERTSEN, Arjan (P.O. Box 3245500 AH Veldhoven), KRAMER, Gijs (P.O. Box 3245500 AH Veldhoven), DE GROOT, Antonius, Franciscus, ...