INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "STOCHASTIC ERROR CALIBRATION METHOD WITH MICRO FIELD EXPOSURES"

GENEVA, May 11 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/078174) for "STOCHASTIC ERROR CALIBRATION METHOD WITH MICRO FIELD EXPOSURES" on Oct 07, 2024. With publication no. WO/2025/093227, the details related to the patent application was published on May 08, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): WANG, Chang An (80 W Tasman Dr.San Jose, California 95134-1720), DELORME, Maxence, Pierre, Jean, Tanguy (P.O. Box 3245500 AH Veldhoven), VAN DIJK, Adrianus, Christian, Johannes (P.O. Box 3245500 AH Veldhoven), FENG, Mu (80 W Tasman Dr.Sa...