GENEVA, Jan. 12 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/065203) for "SPECTRAL FILTER MEMBRANE" on Jun 02, 2025. With publication no. WO/2026/008222, the details related to the patent application was published on Jan 08, 2026.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): HOUWELING, Zomer, Silvester (P.O. Box 3245500 AH Veldhoven)
Abstract: A spectral filter membrane for an EUV lithographic apparatus, the spectral filter membrane comprising a core layer and a cap layer, wherein the core layer and the cap layer are configured such that undes...