INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SIGNAL PROCESSING FOR OVERLAY METROLOGY BASED ON A FRINGE PATTERN"

GENEVA, Oct. 4 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/053163) for "SIGNAL PROCESSING FOR OVERLAY METROLOGY BASED ON A FRINGE PATTERN" on Feb 06, 2025. With publication no. WO/2025/201716, the details related to the patent application was published on Oct 02, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): COENE, Willem, Marie, Julia, Marcel (P.O. Box 3245500 AH Veldhoven), TINNEMANS, Patricius, Aloysius, Jacobus (P.O. Box 3245500 AH Veldhoven), VAN PUTTEN, Eibert, Gerjan (P.O. Box 3245500 AH Veldhoven), ALPEGGIANI, Filippo (P.O. Box 32...