GENEVA, May 11 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/078091) for "SIDEWALL ANGLE METROLOGY" on Oct 07, 2024. With publication no. WO/2025/093220, the details related to the patent application was published on May 08, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): SCHOUMANS, Nicole (P.O. Box 3245500 AH Veldhoven), VAENKATESAN, Vidya (P.O. Box 3245500 AH Veldhoven), VAN LEEST, Adriaan, Johan (P.O. Box 3245500 AH Veldhoven)
Abstract:
There is provided a method for determining angular information of one or more structures comprising: ...