INTERNATIONAL PATENT: ASML NETHERLANDS B.V. FILES APPLICATION FOR "SCRUBBER SYSTEM, EUV RADIATION SOURCE AND EUV UTILIZATION SYSTEM COMPRISING THE SAME AND METHOD OF REMOVING CONTAMINATION"

GENEVA, June 2 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/079525) for "SCRUBBER SYSTEM, EUV RADIATION SOURCE AND EUV UTILIZATION SYSTEM COMPRISING THE SAME, AND METHOD OF REMOVING CONTAMINATION" on Oct 18, 2024. With publication no. WO/2025/108636, the details related to the patent application was published on May 30, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): VAN DRENT, William, Peter (P.O. Box 3245500AH Veldhoven), MA, Yue (17075 Thornmint CourtSan Diego, California CA 92127)

Abstract: A scrubber system for an EUV radiation sourc...