GENEVA, June 10 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2024/080393) for "RETICLE LOAD LOCK SYSTEM AND METHOD" on Oct 28, 2024. With publication no. WO/2025/113901, the details related to the patent application was published on Jun 05, 2025.

Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).

Inventor(s): HARROLD, George, Hilary (77 Danbury RoadWilton, Connecticut 06897), WADE, Robert, Jeffrey (77 Danbury RoadWilton, Connecticut 06897)

Abstract: A reticle load lock having a valve with a variable size orifice, or servo valving, is described. Servo valving can co...