GENEVA, Sept. 21 -- ASML NETHERLANDS B.V. (P.O. Box 3245500 AH Veldhoven) filed a patent application (PCT/EP2025/053909) for "REFERENCE IMAGE DATA" on Feb 13, 2025. With publication no. WO/2025/190599, the details related to the patent application was published on Sep 18, 2025.
Notably, the patent application was submitted under the International Patent Classification (IPC) system, which is managed by the World Intellectual Property Organization (WIPO).
Inventor(s): WIELAND, Marco, Jan-Jaco (P.O. Box 3245500 AH Veldhoven)
Abstract:
Reference image data of a sample, for comparison with detected image data from a multi-beam charged particle system using a plurality of charged particle beams, comprises a combination of: main image data ex...